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1

Impact of boron penetration at P/sup +/-poly/gate oxide interface on deep-submicron device reliability for dual-gate CMOS technologies

Ming-Yin Hao,, Nayak, D., Rakkit, R.

Journal:

IEEE Electron Device Letters

Year:

1997

Language:

english

File:

PDF, 85 KB

english, 1997

2

[IEEE IEEE International Integrated Reliability Workshop, 1996. - Lake Tahoe, CA, USA (Oct. 20-23, 1996)] 1996 International Integrated Reliability Workshop Final Report - Impact of boron penetration at the p/sup +/-poly/gate-oxide interface on the device reliability of deep submicron CMOS logic technology

Nayak, D.K., Ming-Yin Hao,, Rakkhit, R.

Year:

1996

Language:

english

File:

PDF, 178 KB

english, 1996

3

Oxide reliability of drain engineered I/O NMOS from hot carrier injection

Yuhao Luo,, Nayak, D., Gitlin, D., Ming-Yin Hao,, Chia-Hung Kao,, Chien-Hsun Wang,

Journal:

IEEE Electron Device Letters

Year:

2003

Language:

english

File:

PDF, 230 KB

english, 2003

4

Furnace N2O oxidation process for submicron MOSFET device applications

Hyunsang Hwang, Ming-yin Hao, Jack Lee, Viju Mathews, Pierre C. Fazan, Chuck Dennison

Journal:

Solid-State Electronics

Year:

1993

Language:

english

File:

PDF, 302 KB

english, 1993

5

Effects of surface preparation on the electrical and reliability properties of ultrathin thermal oxide

Kafai Lai,, Ming-yin Hao,, Wei-ming Chen,, Lee, J.C.

Journal:

IEEE Electron Device Letters

Year:

1994

Language:

english

File:

PDF, 285 KB

english, 1994

6

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] Microelectronic Device Technology - Effect of local interconnect etch-stop layer on channel hot-electron degradation

Cheek, Jon, Nariman, Homi E., Wristers, Dirk, Nayak, Deepak, Hao, Ming-Yin, Rodder, Mark, Tsuchiya, Toshiaki, Burnett, David, Wristers, Dirk

Year:

1997

Language:

english

File:

PDF, 160 KB

english, 1997

7

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] Microelectronic Device Technology - Device performance and optimization for 5th- and 6th-generation microprocessors

Bandyopadhyay, Bijnan, Cheek, Jon, Dawson, Robert, Duane, Michael, Fulford, Jim, Gardner, Mark I., Hause, Fred N., Ho, Bernard, Kadoch, Daniel, Lee, Raymond, Hao, Ming-Yin, May, Chuck, Michael, Mark,

Year:

1997

Language:

english

File:

PDF, 319 KB

english, 1997

8

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Microelectronics Manufacturability, Yield, and Reliability - Surface cleaning effects on reliability for devices with ultrathin oxides or oxynitrides

Lai, Kafai, Hao, Ming-Yin, Chen, Wei-Ming, Lee, Jack C., Vasquez, Barbara, Kawasaki, Hisao

Year:

1994

Language:

english

File:

PDF, 376 KB

english, 1994

9

[IEEE 1994 IEEE International Electron Devices Meeting - San Francisco, CA, USA (11-14 Dec. 1994)] Proceedings of 1994 IEEE International Electron Devices Meeting - Reliability characteristics and surface preparation technique for ultra-thin (33 Å-87 Å) oxides and oxynitrides

Ming-Yin Hao,, Kafai Lai,, Wei-Ming Chen,, Lee, J.C.

Year:

1994

Language:

english

File:

PDF, 398 KB

english, 1994

10

Silicon-implanted SiO2 for nonvolatile memory applications

Ming-Yin Hao, Hyunsang Hwang, Jack C. Lee

Journal:

Solid-State Electronics

Year:

1993

Language:

english

File:

PDF, 340 KB

english, 1993

11

Electrical characteristics of oxynitrides grown on textured single-crystal silicon

Hao, Ming-yin, Lee, Jack C.

Journal:

Applied Physics Letters

Year:

1992

Language:

english

File:

PDF, 503 KB

english, 1992

12

Memory effects of silicon-implanted oxides for electrically erasable programmable read-only memory applications

Hao, Ming-yin, Hwang, Hyunsang, Lee, Jack C.

Journal:

Applied Physics Letters

Year:

1993

Language:

english

File:

PDF, 483 KB

english, 1993

13

Reliability of Submicron Mosfet's with Deposited Gate Oxides under F-N Injection and Hot-Carrier Stress

Hao, Ming-Yin, Lee, Jack C., Chen, Ih-Chin, Teng, Clarence W.

Journal:

MRS Proceedings

Year:

1992

Language:

english

File:

PDF, 367 KB

english, 1992

14

A comprehensive study of performance and reliability of P, As, and hybrid As/P nLDD junctions for deep-submicron CMOS logic technology

D. Nayak, Ming-yin Hao, J. Umali, R. Rakkhit

Journal:

IEEE Electron Device Letters

Language:

english

File:

PDF, 71 KB

english

15

[IEEE Eleventh Biennial University/Government/ Industry Microelectronics Symposium - Austin, TX, USA (16-17 May 1995)] Proceedings of the Eleventh Biennial University/Government/ Industry Microelectronics Symposium - Breakdown mechanisms and stress-induced leakage current in ultra-thin oxides and N/sub 2/O oxynitrides

Chou, A.I., Lai, K., Kumar, K., Chowdhury, P., Ming-Yin Hao,, Wei-Ming Chen,, Gardner, M., Fulford, J., Lee, J.C.

Year:

1995

Language:

english

File:

PDF, 343 KB

english, 1995

16

Gate quality ultrathin (2.5 nm) PECVD deposited oxynitride and nitrided oxide dielectrics

E. Ibok, K. Ahmed, Ming-yin Hao, B. Ogle, J. Wortman, J. Hauser

Journal:

IEEE Electron Device Letters

Year:

1999

Language:

english

File:

PDF, 63 KB

english, 1999

17

Novel process for reliable ultrathin tunnel dielectrics

Hao, Ming-yin, Maiti, Bikas, Lee, Jack C.

Journal:

Applied Physics Letters

Year:

1994

Language:

english

File:

PDF, 472 KB

english, 1994

18

Incorporation of Nitrogen into Oxynitride Dielectric Through Thermal Nitridation of Silicon

Maiti, Bikas, Hao, Ming-Yin, Lee, Jack C.

Journal:

MRS Proceedings

Year:

1993

Language:

english

File:

PDF, 347 KB

english, 1993

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